http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040090457-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fe40990744fb70df6c32d8919bdf5497 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E05B2015-0403 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E05B59-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E05B15-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 |
| filingDate | 2004-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16383668cab4e900887acd2234d10e01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7710d4f30c7f267eb0ff7a60675a7ccc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5719630834f44391710fa4d5bf280a8d |
| publicationDate | 2004-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20040090457-A |
| titleOfInvention | 1,2naphthoquinone2diazidesulfonate ester photosensitive agent and photoresist composition |
| abstract | 1,2-nap useful as a photosensitizer for photoresist for manufacturing liquid crystal displays, such as semiconductor integrated circuits, liquid crystal displays, and EL displays, which have good solubility and can be manufactured at low cost, as well as having both a sensitivity and a residual film ratio. Toquinone-2-diazidesulfonic acid ester photosensitive agent and photoresist composition are provided.n n n It is a 1, 2- naphthoquinone 2- diazide sulfonic-acid ester photosensitive agent represented by following General formula (1).n n n [Formula 1]n n n n n n n n However, formula (1) of, R 1, R 2, R 3 and R 4 are independently from each other, represents an alkyl group of from C 2 to 9, D 1 ~ D 8 represent, independently of each other, at least two of 1, A 2-naphthoquinone-2-diazidesulfonyl group, at least one of which is an arylsulfonyl group, and the other remainder represent a hydrogen atom. |
| priorityDate | 2003-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 123.