http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040089244-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be61c1fd2dc327440fab386042cbee24 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07357 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2003-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_443e508b6f00a9ee87c9533355dec668 |
| publicationDate | 2004-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20040089244-A |
| titleOfInvention | Needle assembly of probe card |
| abstract | The present invention relates to a needle assembly of the probe card, for this purpose, the present invention forms a needle flow hole (11) at a predetermined width and length at regular intervals in a thin plate of silicon material, the main surface of the needle flow hole (11) Needle guide plate 10 for forming the insulating film 12 to a predetermined thickness; One end surface is attached to one side surface of the needle flow hole 11 in the longitudinal direction, and the other end surfaces have a main flow surface of the needle flow hole 11 and a predetermined flow gap 13, and Except for one end attached to one side, the other side is formed such that the needle plate 20 having a flow space in the vertical direction is integrally provided so that the vertical thickness is thinner than the needle guide plate 10. In addition, the gap between the needles can be greatly reduced along with the miniaturization of the needles, as well as the assembly and productivity of the fabrication of the probe card, and the semiconductor device can be precisely inspected in accordance with the high-density semiconductor devices. Reliability in semiconductor devices while increasing reliability at the time of inspection and responding to the trend toward smaller miniaturization A has a feature to allow further increased. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100744735-B1 |
| priorityDate | 2003-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 16.