| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5ec3abdcf32ea79636cc35223465218c |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F1-08 |
| filingDate |
2003-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee22c845f6af6a005c87fa813d79bf4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84a2d886f59f3557ddcd005acbe0906b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_820debcb1ba5c7d0975f4a554ca07cce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a3eea4513f89b7082eef1823c6a285f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35927ede9cafff43c4175451607682f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3aa54c81c48ee80600e86b24f407d33e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e202e0351a591381f142f434e2cbd981 |
| publicationDate |
2004-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20040088937-A |
| titleOfInvention |
Precursor for preparing a copper thin-film in the chemical vapor deposition method |
| abstract |
The present invention relates to a copper divalent precursor represented by the following formula (1) which can be usefully used in producing a copper thin film by chemical vapor deposition. More specifically, an alkyl group may be introduced at an alpha position of a beta-diketone or a beta-ketoester ligand which does not contain a fluorine group, and a non-covalent electron pair may be provided to the central copper divalent. A copper divalent precursor characterized by having a structure in which an ethylenediamine group is coordinated with a Lewis base.n n n n n n n n n n (Wherein, R and R 1 is a C1-C6 alkyl group or benzyl group, A is an alkyl group or an alkoxy group, L is an ethylenediamine group (R 1 R 2 NCH 2 CH 2 NR 3 R 4 ).) |
| priorityDate |
2003-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |