http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040087881-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bfdf49224a405be1f7b653c56ebad94 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B25J5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B25J9-0096 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B25J9-1674 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23Q5-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F9-94 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-94 |
| filingDate | 2004-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75c66efa92867e9f7c25364e362e1c31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77a4b62a830c89cb7e620cb7cfadae20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e088f9b736c6ff0f3584f8001cf5dfdb |
| publicationDate | 2004-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20040087881-A |
| titleOfInvention | New bismuth compound, method for manufacturing thereof and method for manufacturing film |
| abstract | In the film-forming by CVD method, the novel bismuth compound excellent in vaporization characteristic and thermal stability, its manufacturing method, and film forming method are provided.n n n Formula 1, Formula 5, Formula 9n n n n (Formula 1)n n n n n n n n n n (Formula 5)n n n n n n n n n n (Formula 9)n n n n n n n n n A bismuth compound, its manufacturing method and the film-forming method characterized by the above-mentioned.n n n [R 1 , R 7 are lower alkyl groups, R 2 , R 8 , R 12 and R 13 are lower alkyl groups, lower alkoxy groups and the like, m is the number of substituents R 12 0-5, n 1 , n 2 , n < 3> represents the numbers 0-4 of substituents R < 2> , R < 8> , R < 13> , respectively, and R < 3> -R < 6> , R < 9> -R < 11> , R < 14> and R < 15> represent hydrogen, a lower alkyl group, etc. (However, a specific substituent is shown. Except for the combination of).] |
| priorityDate | 2003-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 249.