| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249954
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-024 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J3-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-12 |
| filingDate |
1995-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2004-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20040086479-A |
| titleOfInvention |
Surface treatment for vacuum chamber made of aluminum or its alloy |
| abstract |
An Al or Al alloy vacuum chamber member that exhibits excellent corrosion resistance against corrosive gases and plasma introduced into the vacuum chamber. This chamber has a porous anodized coating film of large pore diameter on the surface side and small on the substrate side. The initial voltage is higher than the seed voltage for the anodic oxidation treatment. After the porous film is formed, a nonporous film is formed to grow the boundary layer. The alloy members include particles derived from crystallization and recrystallization, preferably their average particle diameter is 10 μm or less and parallel to the maximum area of the member. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100583283-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100842850-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180131278-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190038696-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150009562-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180005035-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101726260-B1 |
| priorityDate |
1994-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |