| abstract |
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an organic light emitting device (OLED) having a passivation layer for inhibiting the penetration of oxygen and moisture.n n n The present invention provides a metal thin film on an organic light emitting device by a chemical vapor deposition (CVD), a multilayer inorganic thin film having a gradual change in component ratio on the metal thin film, and a metal oxide, metal nitride, deposited on the multilayer inorganic thin film, A multilayer protective film structure is fabricated by sequentially depositing a dielectric thin film such as metal carbide, and the multilayer protective film structure exhibits low oxygen permeability and moisture permeability while reducing thermal and mechanical stress generated between the inorganic material layer and the organic material layer. |