http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040076950-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_11d6daa69e4b536a05d2780a69016c13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B03C3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B03C3-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B03C3-49 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B03C3-06 |
| filingDate | 2003-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3af74076153565b7a9976bf383d85dee |
| publicationDate | 2004-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20040076950-A |
| titleOfInvention | Plasma Discharge Dust Collector |
| abstract | A plasma discharge dust collector constituting a part of an exhaust system for purifying and discharging waste gas of a semiconductor manufacturing process, comprising: a tubular dust collector, a tubular discharge electrode inserted into the dust collector, and disposed between the dust collector and the discharge electrode. It is configured to include a plasma discharge consisting of an insulator, one end of the dust collecting electrode is connected to the waste gas inlet pipe, the other end is connected to the waste gas outlet pipe is an exhaust passage of the waste gas, one end of the discharge electrode is combined with the insulator and the dust collection It is electrically insulated from the pole, and the other end is sealed, and a plurality of needle-shaped protrusions are formed at predetermined intervals along the outer circumferential surface of the discharge electrode, and a plurality of communication ports connected to the inside of the discharge electrode are formed along the outer circumferential surface of the discharge electrode. The insulator is coupled to keep the airtight at one open end of the discharge electrode. The compressor body suction port is formed in the shape of the discharge electrode connected to the inside of the discharge electrode, and a dust can is installed in the lower portion of the plasma discharge unit to collect and temporarily store powder collected as solid particles. . |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107249753-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101048430-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102107156-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102107156-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107477704-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100708369-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109939530-A |
| priorityDate | 2003-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.