| abstract |
This invention makes it a subject to propose the method of fixing a functional material to the predetermined position on a to-be-adhered surface accurately. In order to solve such a problem, the functional material fixing method of the present invention is a liquid drop ejection step of ejecting a liquid drop containing a functional material dispersed in a solvent on the adhered surface, and a laser beam on the liquid droplet discharged on the adhered surface And a drying step of locally heating the liquid droplets by vaporizing and vaporizing a portion of the liquid droplets. By this method, not only can the liquid drop be dried quickly, but also the heating of the entire substrate can be suppressed, and alignment misalignment or disconnection due to expansion of the substrate can be avoided. |