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filingDate 2004-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4b8b9fef5c29391e247cabf9755c7ab
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publicationDate 2004-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20040075788-A
titleOfInvention Fluorinated Si-polymers and photoresist comprising same
abstract A photoimaging composition is provided that contains a Si-polymer having a specific fluorine atom to Si atomic ratio. Preferred photoresists of the invention exhibit improved plasma etch resistance.
priorityDate 2003-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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