| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N35-0099
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2033-0095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-4044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2035-00059 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-02 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2003-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a27dd73f7899fd8c9c829acdd7c12c18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9b571841f08bda15608858e500c55c5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce5a832e7e485d1c296fe31c178c5653 |
| publicationDate |
2004-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20040075564-A |
| titleOfInvention |
Apparatus and method for collecting impurity |
| abstract |
In an apparatus and method for collecting impurities remaining on a semiconductor substrate, the rotary chuck adsorbs and rotates the semiconductor substrate. The first scanning solution droplet formed on the lower surface of the scanning nozzle scans the upper surface of the semiconductor substrate to collect the first impurity from the upper surface of the semiconductor substrate. The lower edge portion of the semiconductor substrate disposed in the vertical direction by the drive unit is in contact with the second scanning solution contained in the scanning container. The rotary chuck rotates the semiconductor substrate such that the second scanning solution collects the second impurity from the edge portion of the semiconductor substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100970243-B1 |
| priorityDate |
2003-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |