Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67769 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67393 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
filingDate |
2003-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11adaaa2afe504366f95a010db877432 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91fff08d1d556cdd3cf15f68b6a12fcd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a497b9e63eb9f3ac1ffd2b0120b8451c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bb13c806344ed23ee103e7a8bedcf47 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14fdc1d8758761150d3da30503ae4e9d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21cf3593e62d7b63a7c0c595db654936 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_136a1c2b374162d03d249167984009eb |
publicationDate |
2004-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20040074768-A |
titleOfInvention |
Method for safely storing an object, and apparatus having a storage box and a stocker for storing an object |
abstract |
Disclosed are a storage method and a storage device including a storage box and a stocker capable of safely storing an object to be stored from an external pollutant. The gas is supplied from the outside of the at least one storage box, the first valve communicating with the storage box is opened, and then gas is injected into the storage container through the first valve. The gas pressure inside the storage box is raised to open a second valve communicating with the storage box, thereby discharging the gas inside the storage box to the outside. One side of the stocker is open, the other side is provided with a gas supply pipe. A gas supply unit equipped with a gas shutoff valve is installed at one side of the storage box accommodated in the stocker, and a gas discharge unit equipped with a gas shutoff valve is installed at the other side. By inducing a smooth gas flow inside the storage box, it is possible to effectively remove the pollutants around the object, and to prevent the contamination of the external material from entering the container. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160114549-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10720352-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10580675-B2 |
priorityDate |
2003-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |