http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040057964-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069302aee0d7eee291cd1e0ffa662781 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76814 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7682 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-283 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate | 2003-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_958402feb55ffbe15af21545d699b734 |
| publicationDate | 2004-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20040057964-A |
| titleOfInvention | Manufacturing method for semiconductor device |
| abstract | An object of the present invention is to form a conductor film in a wiring groove formed in a porous low dielectric constant film with good coverage and high adhesion.n n n A porous MSQ 2 is formed on the silicon substrate 1, and a SiC mask 3 is formed thereon. The silicon substrate 1 including the wiring grooves 5 in the porous MSQ 2 by plasma etching using the SiC mask 3 as a mask, and including the side surfaces of the wiring grooves 5 using plasma of the deposition gas. ) The deposition film 7 is formed on the entire surface. Thereafter, the unnecessary deposition film 7 formed outside the sidewalls of the wiring grooves 5 is removed by sputter etching, and a conductor film is formed in the wiring grooves 5. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100847843-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100768474-B1 |
| priorityDate | 2002-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.