abstract |
A photoresist adamantane-based monomer represented by the following formula (1b).n n n [Formula 1b]n n n n n n n n In formula, R < 11> represents a hydrogen atom or a methyl group, R < 12> , R < 13> and R < 14> are the same or different, and represent a hydrogen atom, an alkyl group, or a hydroxyl group, At least of R < 12> , R < 13> and R < 14> One is a hydroxyl group, X represents a linking group, and m and n each independently represents O or 1. |