| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2867
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-287
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2831 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2865
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0433
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0491
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-286 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
2002-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2004-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20040047948-A |
| titleOfInvention |
Reliability evaluation tester, reliability evaluation test system, contactor, and reliability evaluation test method |
| abstract |
The reliability test apparatus 10 of the present invention includes a wafer storage portion 12 that accommodates electrode pads of each of a plurality of devices formed on the wafer W and the bumps of the contactor 11 in electrical contact with each other. This wafer storage portion 12 receives a test signal from the measurement portion 15 and has an airtight, heat-insulating structure. The wafer accommodating part 12 has the press mechanism 13 which presses the contactor 11, and the heating mechanism 14 which directly heats the wafer W which contacted the contactor 11 collectively at predetermined high temperature, and accelerated conditions The reliability of the wiring film and the insulating film formed on the semiconductor wafer is evaluated below. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190025507-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100613105-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006065073-A1 |
| priorityDate |
2001-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |