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filingDate 2002-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2004-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20040045790-A
titleOfInvention Organic anti-reflective coating polymer, its preparation method and organic anti-reflective coating composition comprising the same
abstract According to the present invention, in the process of forming a micro pattern using a photoresist for lithography using 193 nm ArF in a semiconductor device manufacturing process, it is possible to prevent reflection of a lower layer layer and remove standing waves due to changes in thickness of light and photoresist itself. The present invention relates to a polymer for an organic antireflection film and a method for producing the same, which can increase the uniformity of a photoresist pattern. The present invention also relates to an organic antireflection film composition containing such a polymer for an organic antireflection film, an organic antireflection film using the same, and a method of manufacturing the same.
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