Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F290-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F290-062 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F291-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F290-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F291-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
filingDate |
2002-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2004-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20040044868-A |
titleOfInvention |
Composition for actinic energy ray and method of forming pattern |
abstract |
Active energy ray containing a specific vinyl ether group-containing compound (A), a carboxyl group and / or a polymer containing a hydroxyphenyl group (B) and a photoacid generator (C), in which a vinyl ether group is bonded to secondary or tertiary carbon. A composition can form the resist pattern excellent in resolution, without heating at the temperature of 60 degreeC or more after exposure. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100688570-B1 |
priorityDate |
2001-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |