http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040038386-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H02N13-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4585 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2002-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_319f1a7168a6ae8fb977745977531e18 |
| publicationDate | 2004-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20040038386-A |
| titleOfInvention | High density plasma oxide deposition apparatus having a guide ring and a semiconductor device manufacturing method using the same |
| abstract | The present invention relates to a high density plasma oxide film deposition apparatus for embedding a high density plasma (HDP) oxide film in a trench of a semiconductor substrate, and more particularly, a guide ring for protecting the semiconductor substrate in a chamber (CHAMBER). The distance between the semiconductor substrate and the guide ring in a form of a GUIDE RING, or the nitride film for liner (LINER) deposited on the trench before the HDP oxide film is deposited to a predetermined thickness. It is to prevent tearing of the nitride film for the liner of the bevel portion on the semiconductor substrate by minimizing the attack (ATTACK) of the plasma ion (PLASMA ION) generated by the process. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150098452-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100790392-B1 |
| priorityDate | 2002-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579069 |
Total number of triples: 20.