http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040037965-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_83ccbc97b1eaabecc51a5a437cc3f600 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67259 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2002-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4424076d70ae8a48f6fe956d5da8cf59 |
| publicationDate | 2004-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20040037965-A |
| titleOfInvention | Toxic gas detection method and device for semiconductor plants |
| abstract | The present invention relates to a device for detecting a leak of toxic gas in a semiconductor device manufacturing facility, and is intended to be very simple to configure such a device and to efficiently control and manage accordingly.n n n Looking at the method, by forming a detection panel in a separate position spaced from each of the detection position, gathers the necessary number of detection sensors in each of the detection position installed in series, connecting the suction pipe from the detection position to the detection sensor The discharge pipe after passing through the sensor is collected and connected to a large discharge pump so that the discharged air passes through the sensor inside the detection panel through the suction pipe to detect toxic gas.n n n Therefore, in the present invention, the first detection sensors 1 and 1 'are intensively installed in the detection panel 50, and only the suction pipe 2 is piped from each detection position to the detection panel 50. If only the pump 4 is installed in the detection panel 50, the intake of the entire air can be achieved, so the overall configuration is simple and the maintenance is very convenient. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220138254-A |
| priorityDate | 2002-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23969 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548998 |
Total number of triples: 16.