| abstract |
The gas purification system for purifying the target gas includes a gas flow line through which the target gas is purified from the target gas generating mechanism, a discharge reaction device provided in the middle of the gas flow line, and the target gas while the target gas passes through the filter member. A filter member having a structure capable of capturing a specific substance contained in and disposed within the discharge reaction device, and a discharge generation device operatively connected to the discharge reaction device to generate an electric field and generate a discharge plasma inside the discharge reaction device. Include. |