http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040026722-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_78dfbf82955fbcefc74139225ad50c86 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-225 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225 |
| filingDate | 2002-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba6ab3ae2f9855dbff0e515bd0fb1b08 |
| publicationDate | 2004-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20040026722-A |
| titleOfInvention | The Driving method of Eximer Laser with non-penetrated method using magnetic field |
| abstract | The present invention relates to a method of driving a blower in an excimer laser chamber by an external drive motor in a non-penetrating manner by using a magnetic force of a magnet, and the excimer laser chamber contains several mixed pumping gases, which blow the gas evenly. It plays a role in circulation. If the blower in the chamber and the drive shaft of the external drive motor are connected through the chamber, the pumping gas flows out, metal fluoride dust is generated when using the magnetic fluid method, resulting in fluid damage, bearing wear due to vibration of the drive motor, and reduction of laser output power. Cause. Therefore, by separating the inside and the outside of the chamber and using the magnetic force of the magnet to connect the blower and the external motor in a non-penetrating manner, this problem can be solved, a stable laser output power can be obtained, and the chamber can be made easier. |
| priorityDate | 2002-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 14.