http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040024853-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2002-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20040024853-A |
| titleOfInvention | Thermally cured underlayer for lithographic application |
| abstract | A polymer comprising a hydroxy group and an amino crosslinking agent and a thermal acid generator, wherein the polymer comprising a hydroxy group has the following formula,n n n n n n n n R 1 is any one selected from the group consisting of hydrogen or a methyl group; R 2 is either unsubstituted or a substituent selected from the group consisting of a C 6 -C 14 aryl acrylate group or a C 6 -C 14 aryl methacrylate group substituted with a phenyl group, a C 1-4 alkyl group or a C 1-4 alkoxy group ; R 3 is any one selected from the group consisting of C 1 -C 8 alkyl acrylate groups, methacrylate groups or C 6 -C 14 aryl groups with hydroxy functionality, and R 4 is C 1 -C 10 linear or branched Alkylene; p is an integer from 1 to 5 provided that there are no more than 30 carbon atoms in [-R 4 O-] p ; R 5 is selected from the group consisting of C 1 -C 10 linear, branched or cyclic alkyl groups, substituted or unsubstituted C 6 -C 14 aryl groups, or substituted or unsubstituted C 7 -C 15 alicyclic hydrocarbons Any one selected; And m is approximately 40 to 70, n is approximately 15 to 35, and o is a polymer comprising m, n, and o units of approximately 15 to 25; Coating is initiated. |
| priorityDate | 2001-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 223.