| titleOfInvention |
Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser doppler interferometer with specimen light excitation function, using the array, and cantilever |
| abstract |
The present invention provides a cantilever array with a simple configuration and accurate detection of the surface of a sample, a method of manufacturing the same, a scanning probe microscope using the same, a sliding device as a guide / rotation mechanism, a sensor, a homodyne laser interferometer, and a light of a sample. An excitation method of a laser doppler interferometer and cantilever having an excitation function is provided.n n n The cantilever array comprises a plurality of compliant cantilevers 3 which slide on the surface 2 of the sample 1. |