http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040012692-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2001-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20040012692-A |
| titleOfInvention | Antireflective layer for use in microlithography |
| abstract | The present invention is a support; And an element having at least one antireflective layer, the antireflective layer comprising: (a) at least one ethylenically unsaturated compound is polycyclic; -Containing copolymers; (b) branched polymers containing protected acid groups, comprising one or more side branch segment (s) chemically linked along a linear backbone segment; (c) a fluoropolymer having at least one fluoroalcohol group having the formula: -C (R f ) (R f ') OH, wherein R f and R f ' have from 1 to about 10 carbon atoms The same or different fluoroalkyl groups, or together (CF 2 ) n where n is 2 to 10; (d) amorphous vinyl homopolymer or perfluoro of perfluoro (2,2-dimethyl-1,3-diosol) or CX 2 = CY 2 , wherein X = F or CF 3 and Y = -H Amorphous vinyl copolymers of (2,2-dimethyl-1,3-dioxol) and CX 2 = CY 2 ; (e) nitrile / fluoroalcohol-containing polymers prepared from substituted or unsubstituted vinyl ethers; And mixtures thereof. |
| priorityDate | 2000-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 101.