| abstract |
A cleaning liquid and a method of cleaning a ceramic component using the same are disclosed. A cleaning liquid is provided comprising 5 to 10 wt% fluoride salt, 10 to 20 wt% organic acid and 30 to 50 wt% organic solvent and 20 to 50 wt% water. By immersing the ceramic component in the cleaning liquid and then rinsing the cleaning liquid, the ceramic component to which the plasma reaction byproduct is adsorbed can be cleaned. |