http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030091742-A
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-3127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-87684 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4402 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B67D99-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
filingDate | 2003-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2003-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20030091742-A |
titleOfInvention | Purgeable manifold for low vapor pressure chemicals containers |
abstract | A container with two ports; A conduit connecting the vessel to a source / distribution of chemicals and having a first end and a second end and connectors for these ends; A first block valve having two diaphragm valves each comprising a valve seat side and a diaphragm side, each valve seat being opposed to the other valve seat side and connected to a first end of the conduit, one diaphragm A first block valve having a side connected to the first port and the other diaphragm side connected to the outlet; A second block valve having two diaphragm valves each comprising a valve seat side and a diaphragm side, each valve seat side facing the other valve seat side, each valve seat side being connected to a second end of the conduit. A manifold is provided having a second block valve that is connected, wherein the diaphragm side of one valve is connected to purge and the diaphragm side of the other valve is connected to a push gas or chemical outlet. |
priorityDate | 2002-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 55.