| abstract |
The photosensitive polymer according to the present invention is a photosensitive polymer having a mass average molecular weight of 3,000 to 100,000 including a pentafluoromethylvinyl ether derivative monomer of the following formula.n n n n n n n n Wherein R is alkoxy carbonyl, alkylsilane, C 3 -C 20 alkyl carbonyl substituted or unsubstituted with fluorine atoms, C 3 -C 20 cyclized alkylcarbonyl group or fluorine atom substituted or unsubstituted with fluorine atoms Is a substituted or unsubstituted benzoyl group. The photosensitive polymer according to the present invention has at least one pentafluoromethylvinyl ether derivative monomer selected from the group consisting of (meth) acrylic acid monomer, (meth) acrylate monomer, styrene monomer, norbornene monomer, tetrafluoroethylene monomer and maleic anhydride monomer. It is a polymer polymerized with the monomer of. |