http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030077980-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2003-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2003-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20030077980-A |
| titleOfInvention | Substrate processing apparatus |
| abstract | The present invention provides a device capable of reducing the amount of treatment liquid used, reducing the amount of waste liquid, maintaining a high treatment efficiency, and minimizing contamination of members in the circulation path of the liquid.n n n The board | substrate 1 is conveyed in the form inclined with respect to the horizontal plane in the direction orthogonal to a conveyance direction, and a board | substrate conveyance is near the position just below the edge of the lowered side of the board | substrate on the bottom surface in the water washing tank 10. The recovery tank part which installs the boundary plate 20 according to the direction, distinguishes the bottom part in a washing-processing tank with the boundary plate, discharges from the pure water discharge nozzle 14, and collects the pure water which flows down without passing through the board surface. And a drain tank 26 receiving the used pure water discharged from the pure water discharge nozzle and flowing down the substrate onto the lowered side, and flowing from the edge of the water. The used pure water discharged to the inside is discharged. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100870524-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100854981-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100923686-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100613658-B1 |
| priorityDate | 2002-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.