http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030069301-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2002-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7078ec500d0d7a48a98f2ca0131c2439 |
| publicationDate | 2003-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20030069301-A |
| titleOfInvention | Exhaust apparatus and air supplying apparatus for semiconductor manufacturing equipment having improved pipe connecting structure |
| abstract | The present invention relates to an exhaust and air supply device for a semiconductor manufacturing facility with improved piping connection structure.n n n A plurality of semiconductor processing chambers having a predetermined process and a first connection port provided at one side thereof; A duct provided with a second connection port to discharge gas discharged from the semiconductor processing chamber or to supply air to the semiconductor processing chamber; A connection pipe connecting between the first and second connection ports; It includes a fixing means for fixing the connection pipe.n n n The connecting pipe is formed to be stretchable, and the connecting pipe is provided with a static pressure measuring connector for connecting a static pressure meter.n n n By implementing the structure connecting the connecting pipe as described above by the fixing means there is an advantage that can effectively prevent the leakage of exhaust gas or air.n n n In addition, by implementing the connecting pipe in a flexible form, there is an advantage to improve the reusability of the connecting pipe as it can be used to properly handle the transfer or change of equipment.n n n In addition, the static pressure measuring connector is provided in advance in the connecting pipe so that the operator does not penetrate the constant pressure point hole for measuring the static pressure, thereby reducing the measurement time. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019054542-A1 |
| priorityDate | 2002-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.