| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B1-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C11-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 |
| filingDate |
2003-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2003-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20030065412-A |
| titleOfInvention |
Film forming method, film forming apparatus, pattern forming method and manufacturing method of semiconductor device |
| abstract |
The liquid film which forms the liquid film by moving the said nozzle and the said board relatively, and staying the solution supplied on the said board | substrate, discharging the solution adjusted so that the fixed amount enlarged in the board | substrate with respect to the said board | substrate from the discharge port provided in the nozzle continuously In the forming method, the distance h between the discharge port of the nozzle and the substrate is 2 mm or more, and the surface tension γ (N / m) of the solution and the discharge speed q (m / of the solution continuously discharged from the discharge port). sec) and within a range of less than 5 × 10 −5 qγ (mm) provided for the constant 5 × 10 −5 (m · sec / N). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110542648-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101867250-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100843413-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170087524-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10325787-B2 |
| priorityDate |
2002-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |