http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030065340-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31612 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31633 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-1876 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02214 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3121 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate | 2003-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2003-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20030065340-A |
| titleOfInvention | material for insulation film comprising organosilane compound, its manufacturing method and semiconductor device |
| abstract | An insulating film material formed by a chemical vapor deposition method composed of a silane compound in which a secondary hydrocarbon group or a tertiary hydrocarbon group directly bonded to a silicon atom, which is suitable for an interlayer insulating material for semiconductor devices, a semiconductor device using an insulating film and an insulating film formed from the material To provide.n n n An insulating film material formed by a chemical vapor deposition method comprising an organosilane compound represented by formula (1) or the like, which is a material in which a tertiary carbon atom and lithium are directly connected to each other by reacting an organic halide and a metal lithium. It can obtain by making organolithium react with halogenated alkoxysilane or tetraalkoxysilane.n n n [Formula 1]n n n n n n n n (Wherein R 1 , R 2 and R 3 represent a hydrocarbon group having 1 to 20 carbon atoms. R 1 , R 2 and R 3 may be bonded to each other to form a cyclic structure. R 4 has 1 to 10 carbon atoms. A hydrocarbon group or a hydrogen atom, and n represents an integer of 1 to 3.) |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110074462-A |
| priorityDate | 2002-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 427.