http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030057578-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D307-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D307-93 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-93 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D493-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 |
| filingDate | 2001-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2003-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20030057578-A |
| titleOfInvention | (meth)acrylate esters, starting alcohols for the preparation thereof, processes for preparing both, polymers of the esters, chemically amplifiable resist compositions, and method for forming patterns |
| abstract | The (meth) acrylic acid ester of the present invention is represented by the following formula (1). Di (meth) acrylic acid ester is prepared by reducing the addition product obtained by Diels-Alder reaction of 1,3-diene and maleic anhydride to prepare lactone, hydrating it to prepare alcohol, and preparing it by (meth) acrylic esterification can do. The polymer obtained by (co) polymerizing the monomer composition containing the (meth) acrylic acid ester of the present invention is excellent in transparency, dry etching resistance and solubility in an organic solvent, and is preferable as a resin for a chemically amplified resist composition.n n n Formula 1n n n n n n n n Wheren n n R 1 , R 2 , R 3 and R 4 are hydrogen atoms, methyl groups or ethyl groups,n n n X 1 and X 2 are either a (meth) acryloyloxy group, the other is a hydrogen atom,n n n A 1 and A 2 are both hydrogen atoms, or A 1 and A 2 form —O—, —CH 2 — or —CH 2 CH 2 —. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170066294-A |
| priorityDate | 2000-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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