| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2002-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7667383be1d5485400f876d4738a703
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72ffdbb5f1e0a23fc5de4c0439efa73f |
| publicationDate |
2003-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20030052960-A |
| titleOfInvention |
Chemical amplification type positive resist composition |
| abstract |
The present invention is a compound of formula (A), which is insoluble or poorly soluble in aqueous alkali solution, which is capable of achieving high sensitivity while maintaining high resolution, but which is soluble in aqueous alkali solution by the action of acid. A chemically amplified positive resist composition comprising (B) and a quaternary ammonium salt (C).n n n Formula 1n n n n n n n n In Formula 1 above,n n n R 1 is a hydrocarbon group optionally having a substituent containing an oxygen atom or a nitrogen atom or optionally substituted by a halogen atom. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100808427-B1 |
| priorityDate |
2001-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |