| abstract |
In a first aspect, there is provided an organic coating composition, in particular a spin-on antireflective coating composition, containing a component such as a resin comprising an aryl dicarboxylate group. In another aspect, there is provided an organic coating composition, in particular an antireflective coating composition in a spin state, comprising a solvent component containing at least one oxyisobutyric acid ester such as methyl-2-hydroxyisobutyrate. |