http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030044721-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_154f5a8a983d88f296117dcc92946ab4 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-025 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J1-30 |
filingDate | 2001-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f967fdd958140c86a9eafe5a7ebfb505 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_406fa23db6f618d610c6eb2ba5d8890a |
publicationDate | 2003-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20030044721-A |
titleOfInvention | Method for fabricating field emission display device |
abstract | The present invention relates to a method for manufacturing a field emission display device capable of forming a negative hole having a fine hole width and improving uniformity between negative holes. The device manufacturing method of the present invention provides a photosensitive film on a lower substrate provided with a cathode electrode. Making a step; Exposing and developing the photosensitive film to form a photosensitive pillar at a position to form a negative hole; Forming an insulating film covering the photosensitive pillar; Firing the insulating film to vaporize the photosensitive pillar to dent a portion of the insulating film covering the pillar, or to form an empty space inside the insulating film; And etching the recessed portion or the portion having the empty space to form a negative hole. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100784997-B1 |
priorityDate | 2001-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.