Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-032 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
filingDate |
2002-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80ef552c51996da668b98c65da511d09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bffa4a732672dd927e60534c6ed14fee |
publicationDate |
2003-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20030035816-A |
titleOfInvention |
Polymer, Resist Material and Patterning Method |
abstract |
The present invention provides a resist material having a very high resolution and a practical level of etching resistance and useful for precise microfabrication, a pattern forming method using the resist material, and further a polymer compound useful as a base resin of the resist material.n n n A polymer compound having a weight average molecular weight of 1,000 to 500,000 and a material containing the polymer compound, comprising at least one selected from repeating units represented by the following formulas (1) to (3), and repeating units represented by the following formula (4) to provide.n n n <Formula 1>n n n n n n n n <Formula 2>n n n n n n n n <Formula 3>n n n n n n n n <Formula 4> |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101049680-B1 |
priorityDate |
2001-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |