http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030032825-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
filingDate | 2002-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_234f320334f9a97fe9e39a3fe7148a86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d08bfbb914272a63018aee5ccc2bbb8 |
publicationDate | 2003-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20030032825-A |
titleOfInvention | Resist Patterning Process |
abstract | The present invention provides a resist film by (a) coating a resist material containing a polymer or a copolymer and an acid generator that generates an acid upon exposure to a side chain having an acid labile group in a main chain unit of formula (5) on a substrate; 1st process,n n n (b) a second step of prebaking the resist film,n n n (c) a third step of performing a pattern exposure,n n n (d) post-exposure bake fourth process,n n n (e) a fifth step of developing the resist film to form a resist pattern, andn n n (f) A resist pattern forming method having a sixth step of thermally flowing a resist pattern by post-baking the resist pattern. According to the present invention, the degree of integration of the semiconductor LSI can be improved, that is, the degree of processing fineness can be improved.n n n n n n n n n n In the formula, X 1, X 2 is -O-, -S-, -NR-, -PR- or -CR 2 -, and, R is H or an alkyl group, m is an integer from O to 3; |
priorityDate | 2001-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 595.