| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e8ba6870e42607109689c74072ca5d3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2255-204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-2066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2255-2092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2255-206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02C20-30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J21-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J35-0006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-8662
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J23-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J23-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J21-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D39-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-86 |
| filingDate |
2002-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83d100a498dcb9cf0c92a648e09f175b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cb3ec7524060977a2d29acc0a4bdd98
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e69ce3dc6efcf37fe47a51771dd08e9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63380385f24fe44e496da01ef0701087 |
| publicationDate |
2003-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20030027863-A |
| titleOfInvention |
Decompositionally treating agent and decompositionally treating method for fluorocarbons |
| abstract |
A fluorocarbon decomposition treatment agent comprising an aluminum compound and a lanthanoid compound as an active ingredient, wherein the decomposition treatment agent comprises a decomposition treatment agent containing an aluminum compound, a lanthanoid compound and an alkaline earth metal compound as an active ingredient; In addition, the fluorocarbon-containing gas is brought into contact with the above-described decomposition treatment agent under heating, or with the decomposition treatment agent containing aluminum oxide as an active ingredient, and then contacted with the decomposition treatment agent including lanthanoid oxide and alkaline earth metal oxide. Disclosed is a method for decomposing fluorocarbons. According to the above decomposition treatment and decomposition treatment method, the fluorocarbons contained in the exhaust gas discharged from the semiconductor manufacturing industry and similar processes can be decomposed in a short period of time without inactivation of the decomposition treatment agent or the release of corrosive gas such as hydrogen fluoride into the atmosphere. It can be decomposed at a decomposition rate of at least 99.9% at a relatively low temperature of 占 폚 or lower. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100461758-B1 |
| priorityDate |
2001-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |