| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1678
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76849
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76874
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1619
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1669
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate |
2002-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9cf095e21faef08b7234cfe9ab3f1c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b70c4bd13c0eca3ed6f853c48351485d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_541d99c86a90b33ea9a4ba7c25223829
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9a91d36826255f77268709731dab477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58e5d43563c6c43b62d34105aa11b964 |
| publicationDate |
2003-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20030014688-A |
| titleOfInvention |
Device and method for electroless plating |
| abstract |
SUMMARY OF THE INVENTION The present invention provides an electroless plating apparatus and method for suppressing the time course change of a plating liquid and performing electroless plating uniformly and accurately. In an electroless plating apparatus for performing an electroless treatment on a surface to be plated under a predetermined gas atmosphere to form a conductive film, the surface to be plated of the object to be plated (W) is provided so as to contact the inner surface. The plating bath 21 spaced apart from the external atmosphere and the plating liquid supply means 26 for supplying the plating liquid to the surface to be plated so as to alleviate the impact of the plating liquid on the surface to be plated of the object to be plated. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101433393-B1 |
| priorityDate |
2001-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |