| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3ca7c5533ba9d1de0db1353617634b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2002-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b949f8594b7b2b2d736f543437bf107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b19e43b0494a9735305f6f149b6d21c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a157c84e78b93618c19d12e12df1cab8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbf1722b9249b4bbc155522fdf794054
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc40069d1e143f3a74a3eb1a61821e58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a39acc0076fcf15c846337ea8868845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db4ae6cbede983ffcac810dad1423df9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2decbbf746a56b54c6448beae1c5a960
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f221198ebee59b86a185f2891c827fa2 |
| publicationDate |
2003-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20030011564-A |
| titleOfInvention |
Etching method and etching liquid |
| abstract |
The thin silver or silver alloy layer on the substrate is etched uniformly with the etchant to avoid side etching due to excessive etching. The etchant contains silver ions in the range of 0.005 to 1% by weight. The etchant is transferred to a tank or etchant transfer device and then contacted with a thin layer of silver or silver alloy on the substrate. |
| priorityDate |
2001-07-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |