| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1fad0246171945d5e4957c9be0b37a2f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02592
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-04 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02672
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1277
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1296
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02667
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02675 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate |
2002-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24d9e3eecd378fd8d0c527f38a590b45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1fa39d90fb8180723b70844f2ed0589a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cb457f30e95cf2910982d1f71b60d6b |
| publicationDate |
2003-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20030007093-A |
| titleOfInvention |
Semiconductor device and method for manufacturing same |
| abstract |
An object of the present invention is to provide a semiconductor device using a high-quality crystalline semiconductor film such as single crystal while increasing the orientation ratio of a crystalline semiconductor film obtained by crystallizing an amorphous semiconductor film while using a material having low heat resistance such as glass as a substrate. The first crystalline semiconductor film and the second crystalline semiconductor film are laminated on the substrate to form an integral structure to form a crystalline semiconductor layer. The first and second crystalline semiconductor films are polycrystals in which a plurality of crystal grains are collected. However, the crystal grains are aligned in the (101) plane orientation at a ratio of at least 30%, preferably at least 80%. Also, depending on the plane orientation of the crystal grains of the first crystalline semiconductor film, the second crystalline semiconductor film also has a plane orientation in which the probability is aligned in the same direction of 60% or more. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7566602-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7364955-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100753568-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20110115964-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100947180-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101380639-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101054340-B1 |
| priorityDate |
2001-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |