http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030005241-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32688 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate | 2001-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2003-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20030005241-A |
| titleOfInvention | Method and apparatus for varying a magnetic field to control a volume of a plasma |
| abstract | The plasma confinement facility for controlling the volume of the plasma during processing of the substrate inside the processing chamber includes a chamber in which the plasma is ignited and maintained for processing. The chamber is at least partially provided by a wall and further includes a plasma confinement facility. The plasma confinement facility includes a magnet array disposed around the periphery of the processing chamber arranged to produce a magnetic field that forms a peak pattern on the chamber wall. Cusp patterns on the chamber walls define areas where the plasma may be damaged or cause cleaning problems. The cusp pattern is shifted to improve the operation of the substrate processing system and to reduce damage and / or cleaning problems caused by the interaction of the wall with the plasma. Shifting of the cusp pattern can be achieved by moving the magnet array or moving the chamber wall. The movement of any element is continuous (that is, rotates or moves one or more magnetic elements or all or some wall elements) or progressive (ie, periodically shifts the position of one or more magnetic elements or all or some wall elements). May be used). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7423144-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101529890-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7846293-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9718853-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8262848-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9370530-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100884416-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9522160-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9289383-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9278991-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8183224-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022086709-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8609833-B2 |
| priorityDate | 2000-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.