http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020088581-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc905cbef116a1ec61d12125af9427f3
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D473-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D471-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D487-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D239-557
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
filingDate 2001-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f4a8fbb608f76d73242fca694906dcf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92d4650a2108f7fa6001ce748e23fdd1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_403263dbc5c130b4b9c4b83ad16b8ad2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_871b655beb11ce648694a3004a67619a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da1cee7c26dcf2b812a06cc373433ca1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_723e4c5265037cffe06fe9449f039e37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b756a94aaa61c3557dbbad5294b738c9
publicationDate 2002-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20020088581-A
titleOfInvention Silicon-containing copolymer and photosensitive resin composition containing the same
abstract The present invention relates to silicon-containing copolymers comprising maleic anhydride repeat units, norbornene repeat units, and norbornene repeat units having at least one silicon containing group. This silicon-containing copolymer is suitable for use as the upper layer resist of a two layer resist system.
priorityDate 2001-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6063543-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001125272-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0020925-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11349637-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010011604-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11349639-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19990057356-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20525042
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID428201334
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419571081
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69998231
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID428201381
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID75763
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419563201
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415757774
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452585505
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578806
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18232
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451353573
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452697243
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18755846
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22593403
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69999324
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25470
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22506483
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456499112
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15607334
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10329681
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID428201242
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2758875
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID172281
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453405352
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61344
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425829127
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID168265
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393636
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393787
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453571323
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2737137
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458433570
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422804435
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453664937
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69996466
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426217785
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421469809
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320

Total number of triples: 72.