Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31691 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2002-86 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31604 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02112 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02175 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02197 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-792 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-788 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8247 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246 |
filingDate |
2002-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f8c5afe515078f2d32b48b36acbcfbe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35f5df1897ddf63c5804cee9fa1e63fb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bad9af37f6b570a239d0bb9f3c708ae1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb36f3b6fc39c5081aa62c827aa593c1 |
publicationDate |
2002-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20020077239-A |
titleOfInvention |
Method of the synthesis and control of pgo spin-coating precursor solutions |
abstract |
The method for synthesizing the PGO spin coating precursor solution is lead acetate trihydrate (Pb (OAc) 2 · 3H 2 O) and germanium alkoxide (Ge (OR) 4 (R = C 2 H 5 and CH (CH 3 ) 2 ). The use of a starting material). The organic solvent is di (ethylene glycol) ethyl ether. The mixed solution of lead and di (ethylene glycol) ethyl ether is heated in the atmosphere at 190 ° C. or lower for a time at a temperature of 185 ° C. or lower, preferably in the range of 30 minutes to 4 hours. The color of the solution is observed in the heating step to determine when the reaction is complete and when the composition of the desired product begins to form. The solution is then added to germanium di (ethylene glycol) ethyl ether to form a PGO spin coating solution. This second step also requires heating the solution at a temperature below 190 ° C. for a time in the 0.5 to 2.0 hour range. The process yields a PGO precursor solution suitable for use in spin coating. |
priorityDate |
2001-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |