http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020071349-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate | 2001-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_812397010176c55b292bd54c2b3f9471 |
| publicationDate | 2002-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20020071349-A |
| titleOfInvention | Semiconductor device having contact plug capable of preventing lifting-off of metal layer provided thereon and method for manufacturing the same |
| abstract | To prevent peeling of the upper wiring layer by voids generated in the contact plugs connecting the upper wiring layer and the lower wiring layer, the voids are filled with a capping film before forming an interlayer insulating layer or an etch stop layer on the contact plugs in which the voids are formed. In a subsequent electroplating process for forming the upper wiring layer, a technique of preventing the electrolyte solution from filling in the voids is disclosed. Capping film having such a function is SiN, SiC, SiOC, SiOF, TEOS (TetraEthylOrthoSilicate), HDP (High Plasma Density) oxide film. It can consist of USG (Undoped Silicate Glass), PSG (PhosporeSilicateGlass), HSQ (Hydrogen SilsesQuioxane) material, MSQ (MethylSilsesQuioxane) material or BCB (BenzoCycloButene) material or Al, Ti, TiN, Ta, TaN, or TaSiN have. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100909176-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090090623-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100790293-B1 |
| priorityDate | 2001-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.