| abstract |
As a jig material for plasma reaction used in semiconductor manufacturing, there is provided a quartz glass and a quartz glass jig having excellent plasma corrosion resistance, in particular, corrosion resistance to an F-based plasma gas, or a manufacturing method thereof.n n n Quartz glass containing metal elements to increase the plasma corrosion resistance, so that the content of bubbles and foreign matters in the quartz glass was less than 100 mm 2 in the projection area per 100 cm 3. |