| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e8f7e597a893f7d121001c4e8387f59 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2001-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6551e14f5b1508936ad89a5be42fe86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ef3014587fdf174f1a4b3ac221cf8cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e56a674f8d4ed9ea1cc12e1d0ca5d05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9d98d32f757cb075be3debc36b335eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_003755ef375154a838a601d0106963c1 |
| publicationDate |
2002-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20020040638-A |
| titleOfInvention |
Slurry for chemical mechanical polishing |
| abstract |
A copper-based metal is formed when forming a buried wiring of a copper-based metal on a barrier metal film of a tantalum-based metal by use of a polishing slurry containing at least abrasive abrasive, an oxidizing agent and a higher-mono-primary amine. It is possible to suppress dishing and erosion that may occur during chemical mechanical polishing (CMP) on the film. |
| priorityDate |
2000-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |