http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020039412-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ae372ddaa494f2face39592b0429cc16 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B2202-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B2202-08 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-162 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B31-02 |
| filingDate | 2000-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0b0a9cce859a5ca8770502c2bd98c8f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8078a615177f8328187495ea600bb1e2 |
| publicationDate | 2002-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20020039412-A |
| titleOfInvention | Method of Manufacturing Carbon Nanotube |
| abstract | The carbon nanotube manufacturing method according to the present invention comprises the steps of forming a metal film on the back surface of the silicon wafer, forming pores on the silicon wafer on which the metal film is formed, and forming a photosensitive film pattern on the front surface of the silicon wafer on which the pores are formed Forming a metal catalyst layer on the entire surface of the resultant product having the photoresist pattern formed thereon; removing the photoresist pattern to leave the metal catalyst layer only in a portion where the photoresist pattern is not formed; and vertically on the residual metal catalyst layer. It characterized in that it comprises a step of forming carbon nanotubes. According to the present invention, vertically oriented carbon nanotubes which are selectively grown and have excellent field emission characteristics can be prepared by using an electrochemical etching method, a lift-off method, a laser deposition technique or a deposition method by RF magnetron sputtering. . |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103833001-A |
| priorityDate | 2000-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.