| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate |
2001-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d7553b249b3632974346bc3d101edca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2659735b63ca975a440026ec8b41cca4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d389e57c673298dfac4de111857a7519 |
| publicationDate |
2002-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20020039239-A |
| titleOfInvention |
Method for forming a hole-patterned photoresist layer |
| abstract |
The present invention discloses a photolithographic patterning method of a photoresist layer for forming a patterned resist layer having a fine hole pattern on a substrate surface. The method of the present invention forms a patterned resist layer using a specific chemically amplified positive type photoresist composition containing a di- or polyvinyloxy compound such as cyclohexanedimethanol divinyl ether as a crosslinking agent of a resin component. And a step of subjecting the patterned resist layer on the substrate to a heat treatment for thermal flow treatment to reduce the pattern size of the resist pattern. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9310682-B2 |
| priorityDate |
2000-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |