http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020039206-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c535650b049cf935240497035cc37778 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06738 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07314 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06727 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2000-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca45f464d85132052c77f85a84d45590 |
| publicationDate | 2002-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20020039206-A |
| titleOfInvention | Compliant probe apparatus |
| abstract | A mechanically flexible probe is disclosed that electrically connects with a contact pad on a microelectronic device. Probes can be used for burn-in of integrated circuits at the wafer level. It can also be used for probe cards and flip chip sockets to test integrated circuits for other applications. The configuration of the probe includes a probe tip 81, which is supported on an extension arm 82 that projects laterally from the extended leaf spring 83. The spring is supported above the substrate 89 by the posts 85 to allow the probe tip to move freely in the vertical direction by the contact force acting on the probe tip. The bending of the probe tip is flexibly limited by the bending and torsion of the leaf spring. The mechanical flexibility of the tip allows the pads of the integrated circuit and the probe array to contact where the pads are not strictly planar. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101324284-B1 |
| priorityDate | 2000-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.