http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020035838-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06772 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06716 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06744 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06727 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07342 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01R13-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2884 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07364 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01R13-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06755 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 2001-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20020035838-A |
| titleOfInvention | Probe card and method of producing the same |
| abstract | This probe card 100 is equipped with the contactor 92, the board | substrate 94, the signal transmission path 96, the ground conductor part 98, and the hole part 102. FIG. The signal transmission path 96 is formed on the substrate 94. The substrate 94 is formed of a dielectric material or a semiconductor material. The contactor 92 is formed of a metal glass material at one end of the signal transmission path 96 on one side of the substrate 94. By using the microfabrication technique of the metallic glass material, it becomes possible to form the contact 92 very finely. The contactor 92 is provided above the hole portion 102 and is formed to be spaced apart from the substrate 94. The contactor 92 has elasticity in a direction perpendicular to the surface of the substrate 94, and it becomes possible to elastically contact the connecting terminal formed in the circuit under test during the test. The probe card 100 of the present invention forms a contactor 92 made of a metallic glass material, so that it is possible to transmit a high frequency signal to an integrated circuit having a large number of pads at a narrow pitch. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101010671-B1 |
| priorityDate | 2000-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758 |
Total number of triples: 28.